| 基于双频激光干涉技术的高精度直线度基准装置 |
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| 引用本文： | 赵辉,浦昭邦,刘国栋.基于双频激光干涉技术的高精度直线度基准装置[J].中国激光,2001,28(7):637-640. |
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| 作者姓名： | 赵辉 浦昭邦 刘国栋 |
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| 作者单位： | 1. 上海交通大学电子信息学院仪器系
2. 哈尔滨工业大学自动化测试及控制系 |
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| 摘 要： | 提出一种高精度直线度基准装置 ,它以激光波长作为测量基准 ,采用双频激光干涉技术和直尺反转误差分离技术 ,在一般实验室条件下实现了优于 0 1μm/m的测量不确定度。目前该装置已应用于航天质量保证体系国防校准实验室
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| 关 键 词： | 直线度 测量 双频激光 直尺 反转 |
| 收稿时间： | 2000/4/14 |
High Precision Straightness Device Based on Double frequency Laser Interference Technique |
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| ZHAO Hui,PU Zhao bang,LIU Guo dong.High Precision Straightness Device Based on Double frequency Laser Interference Technique[J].Chinese Journal of Lasers,2001,28(7):637-640. |
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| Authors: | ZHAO Hui PU Zhao bang LIU Guo dong |
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| Affiliation: | ZHAO Hui 1 PU Zhao bang 2 LIU Guo dong 2 1Department of Information Detection and Instrument,Shanghai Jiaotong University,Shanghai 200030 2Department of Automatic Measurement and Control,Harbin Institute of Technology,Harbin 15000 |
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| Abstract: | A high precision straightness standard device based on double frequency laser interference and edge reverse techniques was presented in this paper, in which the laser wave length was taken as the measuring datum. This device which could get the accuracy over 0.1 μm/m under common lab condition was applied in astronautics calibration laboratory. |
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| Keywords: | straightness measurement double frequency laser reverse |
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