微电子工业对超净高纯化学品的质量要求

我国为微电子工业配套使用的高规格超净高纯化学品一直依赖进口,此类化学品研发中的核心技术为德国、日本、美国等国家所垄断,其关键技术的国内外文献报道甚少。为便于国内相关研发单位开展研究工作,围绕微电子工业对超净高纯化学品的质量要求,搜集、整理并分析了近二十年来的相关文献,研究了不同规模集成电路对这类化学品纯度、洁净度的质量规格要求,建议:制定有全球竞争力的超净高纯化学品国家标准;建立相关产品生产管理制度和实施细则;建立能与国际资深实验室进行测试技能交流的有世界公信力的分析检测平台。

Quality Requirements for ultra clean and high Purity Chemicals in the Micro-electronic Industry

The high specification ultra clean and high purity chemicals in the micro -electronic industry are all almost imported in our country. The key technologies for these products＇ performances are controlled by German, Japan and USA etc. However till now there are few reports about the key technologies both in aboard and inland. In order to benefit to the research work in our country, references in quality requirements of ultra clean and high purity chemicals in the micro - electronic industry in recent 20 years are collected and analyzed in this paper. Different grade integrated circuits have different quality requirements of chemical purity and cleanness. Global competitive national standard of ultra clean and high purity chemicals and the corresponding productive management system and detailed rules for implementation of the relative productions, as well as world creditable public analysis and measurement platform, being capable of exchanging measurement technologies with international key labors are suggested to be established.