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Orientation dependentp-type conversion of Fe:InP in hydride VPE regrown EMBH lasers
Authors:B C Johnson  T J Bridges  F G Storz
Affiliation:(1) AT&T Bell Laboratories Crawford Hill Laboratory Holmdel, 07733, New Jersey;(2) AT&T Bell Laboratories Holmdel, 07733, New Jersey
Abstract:We have studied semi-insulating Fe:InP regrowth of etched mesa buried heterostruc-ture lasers by hydride vapor phase epitaxy. Type-sensitive staining and electron beam induced current photographs have shown that regions near the original etched mesa are p-type instead of semi-insulating in a number of our wafers. These regions begin and end on distinct crystal boundaries, indicating that thep-type conversion is not due to simple diffusion of Zn out of the laser base structure, but is associated with uncontrolled growth of {111}In crystal planes.
Keywords:Regrowth  laser  semi-insulating InP  hydride vapor phase epitaxy
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