Orientation dependentp-type conversion of Fe:InP in hydride VPE regrown EMBH lasers |
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Authors: | B C Johnson T J Bridges F G Storz |
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Affiliation: | (1) AT&T Bell Laboratories Crawford Hill Laboratory Holmdel, 07733, New Jersey;(2) AT&T Bell Laboratories Holmdel, 07733, New Jersey |
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Abstract: | We have studied semi-insulating Fe:InP regrowth of etched mesa buried heterostruc-ture lasers by hydride vapor phase epitaxy.
Type-sensitive staining and electron beam induced current photographs have shown that regions near the original etched mesa
are p-type instead of semi-insulating in a number of our wafers. These regions begin and end on distinct crystal boundaries,
indicating that thep-type conversion is not due to simple diffusion of Zn out of the laser base structure, but is associated with uncontrolled
growth of {111}In crystal planes. |
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Keywords: | Regrowth laser semi-insulating InP hydride vapor phase epitaxy |
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