Molecular dynamics simulation study of the growth of a rough amorphous carbon film by the grazing incidence of energetic carbon atoms |
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Authors: | Minwoong Joe Myoung-Woon Moon Jungsoo Oh Kyu-Hwan Lee Kwang-Ryeol Lee |
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Affiliation: | Computational Science Center, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul 130-650, South Korea |
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Abstract: | The morphological evolution of an amorphous carbon film deposited by energetic carbon atoms of 75 eV with various angles of incidence was investigated by molecular dynamics simulation. Normal or near-normal incidence of carbon atoms resulted in a smooth surface of the deposited film. In contrast, a bump-like surface structure emerged and led to rough surfaces at grazing incidences, in agreement with the experiments. The bifurcated growth mode was explained by the impact-induced transport of atoms on the growing surface. The downhill transport of atoms on a sloping surface dominates at normal incidence, which suppresses the evolution of surface irregularities to form a rough surface. However, the dominance of uphill transport at a grazing incidence made the surface irregularities grow to a seed structure, which provided the shadowing effect during carbon deposition. This mechanism mediates initial seed formation and subsequent roughening together with shadowing effects under grazing incidence. |
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