The production of a cellular graphene array by scanning probe lithography and its ability to store electrical charge

A graphene cellular array on an insulating SiO₂ layer was fabricated by scanning probe lithography. The graphene layer was oxidized by an electric field which was applied between the cantilever tip and Si substrate without any electrode directly connected to the graphene layer. When the bias voltage was applied on a cell of patterned graphene through the cantilever tip, charge was accumulated on the cell and preserved for a long time without decay. The accumulated charge and the surface potential were measured by an electrostatic force microscope. The charge retention was measured as a function of time, and the decay time constant was estimated to be ～70 min.