| 空心圆管内表面等离子体源离子注入鞘层的数值模拟 |
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| 引用本文： | 赵璐璐,王海星. 空心圆管内表面等离子体源离子注入鞘层的数值模拟[J]. 大连工业大学学报, 2007, 26(2) |
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| 作者姓名： | 赵璐璐 王海星 |
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| 作者单位： | 大连工业大学信息科学与工程学院,辽宁大连,116034;大连船舶重工集团海洋工程事业部,辽宁大连,116021 |
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| 摘 要： | 建立了一维无碰撞流体动力学模型,针对柱形容器,考察了无附加电极和在中心轴线处放置零电位附加电极两种情况下,空心圆管内部等离子体鞘层的演化过程。得出了各自情况下鞘层中电势分布、离子密度分布,空心圆管内表面离子束流密度分布和离子注入剂量分布.
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| 关 键 词： | 等离子体源离子注入 流体动力学 等离子体鞘层 |
Computer simulation of plasma sheath evolution in plasma source ion implantation near a cylindrical bore |
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| ZHAO Lu-lu,WANG Hai-xing. Computer simulation of plasma sheath evolution in plasma source ion implantation near a cylindrical bore[J]. Journal of Dalian Dalian Polytechnic University, 2007, 26(2) |
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| Authors: | ZHAO Lu-lu WANG Hai-xing |
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| Abstract: | A one-dimensional fluid dynamic model of PSII for collisionless plasma was set up.The ion dynamics in a cylinder-shaped container with or without auxiliary electrode was calculated using this fluid model and the potential,ion density and ion dynamics in the sheath were obtained.The calculation of the ion flux and ion dose among the inner surface showed the existence of the different density,flux and dose distribution at any time. |
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| Keywords: | plasma source ion implantation(PSII) fluid dynamic plasma sheath |
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