复合膜吸杂技术在硅分立器件制造中的应用

利用复合膜吸杂技术处理硅晶体材料改善硅衬底及外延片质量的吸杂原理.通过三探针测量、DLTS 检测、MOS 电容器弛预时间、器件结特性的改善和成品率的提高显示了复合膜吸杂的吸杂效果.实验结果表明,复合膜吸杂枝术是有效、简便、可控、稳定、成本低廉且与器件制造工艺是相容的.很有开发、推广价值.

Application of Complex Membrane Gettering Technique to the Manufacture of Silicon Seperated Devices

By application of the conplex membrane gettering technique to the treatment of silicon crystal materials for the improvement of silicon substrates and epit- taxial wafers,the principle of gettering is stated in this paper. The effective function of complex membrane gettering technique is tested by three probes measurement,DLTS detection,retention time of the control of MOS condenser,improvement of the characteristic of device junction and in- crement of qualified product rate. The experiment results show that the complex membrane gettering results techniques is efficient,simple,comtrollable,stable,cheap and consistent with the technology of products.So this technique is worth developing and spreading its use.