金刚石热化学抛光的机理研究

在完成了金刚石表面的热化学抛光后,应用原子力显微镜(AFM)观测加工后表面形成的微观结构,并用扫描电子显微镜(SEM)加以校验.借助X射线光电子能谱(XPS)技术对采样所得铁盘的两个不同区域进行多方面的对比分析,初步确定了抛光过程中发生的理化反应和结果生成物.并在此基础上对热化学抛光各阶段的工作机理作了深入探讨,明确了研磨表面平整、出现凹槽等现象的原因.结论与实验分析结果能够较好地吻合.

Mechanism research on thermo-chemical polishing of diamond

Having finished thermo_chemical polishing on diamond's surface, the authors used an atomic force microscope to observe the microstructure on its surface,and made a checkout on the result with scanning electronic microscopy. By using X_ray photon_electronic spectrum technology, the authors made a comparative analyses on each of the two different zones of the iron plate in several aspects, and preliminarily ascertained the physical and chemical reactions and resultants during the polishing process. Based on the work, the authors systematically probed into the mechanism of the thermo_chemical polishing. Finally, the reasons for flat ground surface and grooves appearing on the diamond's surface were found out. The given explanation matches well with the observed results.