多功能干涉测量装置及其应用

根据三种基本类型的多光束干涉条纹形成原理,设计与制造了多功能干涉测量装置。该装置是借助于光学与机械结构的变换与组合,使之变换成多种型式的干涉仪,分别用于多种精密测量:测量微位移、微幅振动、薄膜厚度、表面粗糙度、光学零件的面形,角度以及分析激光器的模谱精细结构,

An Universal Interference Measuring Apparatus and its Application

The Universal inetrference measuring apparatus is designed by the use of three basic types of multiplebeam interference fringe. The apparatus can be converted into various types of interferometers by means of the different conversion and combination of optical mechanical constrctions. It is used in a variety of precise measurementts such as the measurement of small displesment, micro-amplitude of vibration, thickness of coating film, irregularity and paraller error of optical elements, as well as the analysis of laser-mode structure.