基于菱形搜索块匹配技术的微机电系统微运动测量研究

首先，分析了块匹配运动模型和测量原理，采用最小总绝对差值设置块匹配准则，确立了菱形搜索算法的块匹配搜索路径。该算法通过大小模板块匹配进行粗定位和精定位，求解微运动最佳运动矢量。然后，设计了基于计算机微视觉的微机电系统图像获取方案，并以微机电系统谐振器为研究对象，获取24幅不同相位图像，用所提出的微运动测量方法进行分析和验证，结果表明：基于最小总绝对差值和菱形搜索算法的块匹配技术能较好地估计和测量微机电系统器件的微运动矢量。

Research on MEMS Micro-motion Measurements Based on Diamond Search Block-matching Technology

Firstly, the model of block-matching motion and measurement principles were analyzed, and the algorithm of diamond search-based block-matching path search was established using the minimum sum of absolute difference(MSAD) to set block-matching criterion. The algorithm of diamond search-based block-matching located roughly or precisely by large diamond search pattern (LDSP) or small diamond search pattern (SDSP), and to compute the best motion vector of micro-motion. Next, MEMS image acquisition programme of computer micro-vision was designed, and 24 resonators image of different phase were analyzed and tested by the proposed micro-motion measurement method. The results show that block-matching technology based on MSAD and diamond search algorithm may well estimate and measure micro-motion vectors of MEMS devices.