单晶DD98微尺度铣削表面质量试验研究

为探究单晶DD98微尺度铣削的表面质量，采用直径为0.6mm的微铣刀对单晶DD98进行三因素五水平的微尺度铣削正交试验。通过极差分析和方差分析发现：主轴转速对DD98表面质量的影响最大，铣削深度的影响次之，进给速度的影响最小；单晶DD98表面质量最好的工艺参数组合为主轴转速36000r/min，铣削深度5μm，进给速度100μm/s。得到了主轴转速、铣削深度和进给速度对表面质量的影响规律，并对其机理进行了分析，从而为单晶DD98材料的微尺度铣削加工提供理论依据。

Experimental Study on Surface Quality of Single Crystal DD98 in Micro-milling Processes

In order to explore the surface quality of single crystal DD98 in micro-milling processes, a three-factor and five-level orthogonal experiments of single crystal DD98 in micro-milling processes were conducted by a micro-milling tool with 0.6mm diameter. Firstly, after range analysis and variance analysis, the spindle speeds have the greatest effects on surface quality. Then the milling depth follows. The feed rate has the least effect on surface quality. The optimized processing parameter combinations are as the following: spindle speed of 36000r/min， milling depth of 5μm, feed rate of 100μm/s, and the surface quality of single crystal DD98 is the best. Then the influences of spindle speeds， milling depths and feed rates on surface quality were obtained respectively. Deeply analysis of their causes were also given, providing a theoretical basis for the processing of single crystal DD98 material in micro-milling processes.