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Recollections of fifty years with sputtering
Authors:Peter Sigmund
Affiliation:
  • Department of Physics, Chemistry and Pharmacy, University of Southern Denmark, DK-5230 Odense M, Denmark
  • Abstract:The paper is an attempt to trace milestones in the understanding of sputtering by ion bombardment. The field developed rapidly between 1955 and the end of the 1980s, but several important aspects are still under active investigation today. The focus here is on the evolution of the present understanding of the process of sputter emission. The presentation is based primarily on physical arguments, supported by results from theory referred to in the text. Many research groups have contributed to this field. Doing justice to them all appears close to impossible within the given frame.
    Keywords:Sputtering   Sputter emission   Sputter erosion
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