| 金刚石薄膜场发射四极管的计算机模拟 |
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| 引用本文： | 曾葆青,杨中海. 金刚石薄膜场发射四极管的计算机模拟[J]. 真空科学与技术学报, 1998, 0(5) |
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| 作者姓名： | 曾葆青 杨中海 |
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| 作者单位： | 电子科技大学高能电子学研究所!成都610054 |
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| 基金项目： | 电子科学研究院预研基金 |
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| 摘 要： | 采用广泛使用的粒子模拟程序MAGIC模拟了以金刚石薄膜作为发射体的真空微电子三极管和四极管的特性，得出了电子运动的轨迹图，从中可以看出上栅极对电子的会聚作用。研究了发射特性与栅极电压、发射体表面积大小等参量的关系，还讨论了电子在阳极、栅极间的分配情况。
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| 关 键 词： | 真空微电子学 场致发射阵列阴极 PIC模拟 |
A Computer Simulation of the Field Emission Microtetrodes Made of Diamond Films |
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| Zeng Baoqing, Yang Zhonghai. A Computer Simulation of the Field Emission Microtetrodes Made of Diamond Films[J]. JOurnal of Vacuum Science and Technology, 1998, 0(5) |
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| Authors: | Zeng Baoqing Yang Zhonghai |
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| Abstract: | The charateristics of both the vacuum micmelectronics triode and the tetrode with planar emit-ters made of diamod films were simulated by the popular particle-in-cell simulation program MAGIC. The elec-tron trajectories were obtained,which showed that electron beams have been focued by the upper gate. The cur-rent distribution in the area between the gates and the anode was also evaluated. The influence of the lower gate voltage and the emitter sizes on the emission characteristics of the devices was also calculated. |
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| Keywords: | Vacuum microclectronics Field emission array Particle-in-cell simulate |
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