基于多项目晶圆服务的工作站管理与维护

介绍了集成电路（IC）的多项目晶圆（MPw）服务及面向MPW服务的工作站管理与维护。随着工艺种类的日益增多及MPW服务的开展，对IC设计必不可少的工作站及相关工具软件进行有效的管理也越来越重要。本文首先介绍了MPW服务流程，随后介绍了多种工艺并存情况下工作站目录的设置与管理；还介绍了进行MPW服务时如何对设计自动化（EDA）软件进行配置和维护，并将这些软件分为工艺相关软件和非相关软件分别处理；最后，给出了一个MPW成功流片的实例。

The Workstation Management and Maintenance for Multiple Project Wafer Service

This paper introduces the multiple project wafer(MPW) service and the management and maintenance of workstation for MPW.With the development of MPW service and the increasing of IC technologies,it is more and more important to manage workstation and EDA tools efficiently.First,MPW service flow is described,then we discuss the configuration and management about workstation directions when there are multiple IC technologies.The configuration and maintenance of EDA tools are also introduced.At last,an example of MPW service is given.