Acceptance sampling: an efficient, accurate method for estimatingand optimizing parametric yield [IC manufacture] |
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| Authors: | Elias N.J. |
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| Affiliation: | Philips Lab., Briarcliff Manor, NY; |
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| Abstract: | Acceptance sampling is a new yield estimation and optimization method which combines the accuracy of Monte Carlo analysis with the computational efficiency of response surface methods. Response surface approximations are used to guide selection of simulation samples. Formulas based on established statistical methods (viz., confidence intervals, stratified sampling) estimate yield and predict accuracy. Yield optimization procedures employ conventional search algorithms. Examples using 50 to 100 simulations demonstrate accuracy matching 1000 to 10000 Monte Carlo samples |
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