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Self-Consistent Model for Pulsed Direct-Current N2 Glow Discharge
Authors:Liu Chengsen  Wang Dezhen
Abstract:A self-consistent analysis of a pulsed direct-current (DC) N2 glow discharge is presented. The model is based on a numerical solution of the continuity equations for electron and ions coupled with Poisson's equation. The spatial-temporal variations of ionic and electronic densities and electric field are obtained. The electric field structure exhibits all the characteristic regions of a typical glow discharge (the cathode fall, the negative glow, and the positive column).Current-voltage characteristics of the discharge can be obtained from the model. The calculated current-voltage results using a constant secondary electron emission coefficient for the gas pressure 133.32 Pa are in reasonable agreement with experiment.
Keywords:pulsed DC glow discharge  plasma nitriding  self-consistent model
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