Modelling and analysis of multiple cluster tools system with random failures using coloured Petri net

Semiconductor manufacturing is among the most complicated and expensive operation systems encountered today and multiple cluster tool system has become an important technology in semiconductor manufacturing systems with the advantages of higher yields and shorter cycle times. Modelling and simulation has become a standard methodology in order to understand and predict performance of semiconductor manufacturing systems. Resources random failures during process execution are one major concern regarding system performance measured in terms of throughput and cycle time. This study aims to models and analyse random failures of processing modules of multiple cluster tool systems using coloured Petri net method. The impact of different input factors on system throughput and cycle time is presented.