| 脉冲电弧沉积类金刚石薄膜特性的研究 |
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| 引用本文： | 刘缠牢,梁海锋,严一心. 脉冲电弧沉积类金刚石薄膜特性的研究[J]. 表面技术, 2006, 35(4): 37-39 |
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| 作者姓名： | 刘缠牢 梁海锋 严一心 |
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| 作者单位： | 西安工业大学薄膜技术与光学检测重点实验室,陕西,西安,710032;西安工业大学薄膜技术与光学检测重点实验室,陕西,西安,710032;西安工业大学薄膜技术与光学检测重点实验室,陕西,西安,710032 |
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| 摘 要： | 利用脉冲电弧镀技术在硅基片上沉积类金刚石薄膜,研究薄膜的光谱特性、摩擦磨损特性、硬度、电阻率和稳定性.用椭圆偏振法测试拟合得到薄膜的光学常数,傅立叶变换红外光谱仪测试薄膜的光谱特性;利用摩擦磨损实验仪测量薄膜的耐摩擦性能;利用维氏硬度计表征薄膜的硬度.结果表明薄膜在光谱范围1.25～10μm内透明,光学常数随波长的变化而变化,具有高达40GPa的维氏硬度、高的电阻率、良好的摩擦学特性和化学稳定性等.
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| 关 键 词： | 类金刚石薄膜 脉冲电弧 光学特性 机械特性 |
| 文章编号： | 1001-3660（2006）04-0037-03 |
| 收稿时间： | 2006-05-08 |
| 修稿时间： | 2006-05-08 |
Research on the Properties of Diamond-like Carbon Film by Pulsed Arc Deposition |
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| LIU Chan-lao,LIANG Hai-feng,YAN Yi-xin. Research on the Properties of Diamond-like Carbon Film by Pulsed Arc Deposition[J]. Surface Technology, 2006, 35(4): 37-39 |
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| Authors: | LIU Chan-lao LIANG Hai-feng YAN Yi-xin |
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| Abstract: | Diamond-like carbon(DLC) films are grown on silicon substrate by pulsed arc deposition.The films' optical properties,wear properties,hardness,anti-resistance and chemical stability are researched.Ellipsometry is used to acquire the films' constant,and FIIR is applied to analyze spectral properties.The films' wear properties are presented by the pin-on-disc tribometer,and hardness is measured by VIKER.The results show that DLC films display up to 40Gpa hardness,exhibite high anti-resistance index,have good wear properties and chemical stability. |
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| Keywords: | Diamond-like carbon film Pulsed arc Optical property Mechanical property |
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