Quantitative x-ray microanalysis of spherical inclusions embedded in a matrix using a SEM and Monte Carlo simulations

The current schemes of quantification of x-ray microanalysis in the SEM [ZAF and σ(ρZ) methods] are valid for specimens of homogeneous composition. The determination of the chemical composition of small inclusions using these techniques is impossible because the volume of x-ray emission is not of homogeneous composition. A scheme of quantification to determine the composition of small inclusions embedded in a matrix has been developed using Monte Carlo simulations. This scheme is similar to that developed by Kyser and Murata (1974) for the quantification of thin foils deposited on a substrate using x-ray microanalysis in the SEM.