| 基于时域有限差分方法的点衍射波前误差分析 |
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| 引用本文： | 陈琛,杨甬英,王道档,卓永模.基于时域有限差分方法的点衍射波前误差分析[J].中国激光,2011(9). |
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| 作者姓名： | 陈琛 杨甬英 王道档 卓永模 |
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| 作者单位： | 浙江大学现代光学仪器国家重点实验室; |
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| 摘 要： | 小孔的直径影响小孔衍射波前的误差,进而会影响点衍射干涉(PDI)检测的精度。基于矢量衍射理论中的时域有限差分(FDTD)方法,精确分析了可见光情况下衍射小孔直径接近以及小于入射光波长时所对应的衍射波前相对于标准球面波的偏离误差。数值仿真结果表明,当小孔的直径为400 nm时,所对应的数值孔径为0.65的衍射波前的误差峰谷值小于1 nm,而误差均方根值小于0.35 nm。随着小孔尺寸的减小,其衍射波前的误差进一步减小。仿真结果原理上验证了小孔点衍射干涉方法用于实现大数值孔径球面的高精度检测的可行性,并为实际检测中点衍射小孔尺寸的选择提供了精确的数值依据。
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| 关 键 词： | 光学测量 点衍射干涉检测 时域有限差分法 波前误差 矢量衍射 |
Analysis of Point-Diffraction Wavefront Error Based on Finite Difference Time Domain Method |
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| Chen Chen Yang Yongying Wang Daodang Zhuo Yongmo.Analysis of Point-Diffraction Wavefront Error Based on Finite Difference Time Domain Method[J].Chinese Journal of Lasers,2011(9). |
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| Authors: | Chen Chen Yang Yongying Wang Daodang Zhuo Yongmo |
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| Affiliation: | Chen Chen Yang Yongying Wang Daodang Zhuo Yongmo(State Key Laboratory of Modern Optical Instrumentation,Zhejiang University,Hangzhou,Zhejiang 310027,China) |
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| Abstract: | The dimension of pinhole affects the error of diffraction wavefront,which is the critical element that determines the precision of point diffraction interferometer(PDI).The deviation of diffracted wavefront from an ideal sphere at visible wavelength,which is aroused by the dimension of the pinhole,is numerically analyzed based on the finite difference time domain(FDTD) method.The simulation results show that the peak-to-valley(PV) value of diffraction wavefront error is less than 1 nm and the root mean squa... |
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| Keywords: | optical measurement point diffraction interferometry finite difference time domain diffraction wavefront error vector diffraction |
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