| 平面面形绝对检验技术测量误差分析 |
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| 引用本文： | 徐洋,唐锋,王向朝,徐静浩,范李立,程欣.平面面形绝对检验技术测量误差分析[J].中国激光,2011(10). |
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| 作者姓名： | 徐洋 唐锋 王向朝 徐静浩 范李立 程欣 |
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| 作者单位： | 中国科学院上海光学精密机械研究所信息光学与光电技术实验室;中国科学院研究生院; |
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| 基金项目： | 国家自然科学基金重点项目(60938003)资助课题 |
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| 摘 要： | 绝对检验消除了参考面面形误差对干涉测量精度的制约,可实现纳米精度的面形测量。对现有主要平面面形绝对检验技术进行了总结比较,运用泽尼克多项式前36项构建被测平面,对边缘噪声、平面原始精度、旋转角度与偏心误差等因素对典型平面面形绝对检验技术测量精度的影响进行了模拟分析。绝对检验对被测平面原始精度、干涉图分辨率和旋转角度误差不敏感,对边缘噪声和旋转偏心误差敏感。实际测量中,旋转轴心对准误差应小于2 pixel,测量中心面积比取95%左右。
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| 关 键 词： | 测量 干涉测量 绝对检验 奇偶函数法 旋转对称法 镜面对称法 |
Measurement Error Analysis of Absolute Flatness Test |
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| Xu Yang, Tang Feng Wang Xiangzhao, Xu Jinghao Fan Lili Cheng Xin.Measurement Error Analysis of Absolute Flatness Test[J].Chinese Journal of Lasers,2011(10). |
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| Authors: | Xu Yang Tang Feng Wang Xiangzhao Xu Jinghao Fan Lili Cheng Xin |
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| Affiliation: | Xu Yang1,2 Tang Feng1 Wang Xiangzhao1,2 Xu Jinghao1 Fan Lili1 Cheng Xin1 (1Laboratory of Information Optics and Opto-Electronic Technology,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China 2Graduate University of Chinese Academy of Sciences,Beijing 100049,China) |
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| Abstract: | Absolute test eliminates the errors of reference flats which limit the accuracy of interference measurement,so that the figure of optical surface can be measured with nanometer accuracy.We give a brief review and comparison of several mainstream absolute flatness test methods.And then the impacts of edge noise,figure grades of the flats under test,rotation angle error and rotation eccentricity,etc.on the measurement error of absolute test are analyzed respectively.The first 36 Zernike polynomial terms are u... |
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| Keywords: | measurement interferometry absolute test odd-even function method rotation symmetry method mirror symmetry method |
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