基于DSP的直流磁控溅射电源设计

该文通过研究磁控靶工作时的负载特性,设计了以全桥逆变开关电源技术为基础的高效、大功率磁控溅射电源。利用Matlab搭建的模型对电路的参数、输出波形进行了仿真,在仿真的基础上完成了主回路、控制电路硬件及软件程序的设计及样机测试,并在JTP-1400型磁控溅射镀膜机上进行了实验。实验结果证实该电源具有恒流控制效果好,电流截止负反馈反应迅速,工作稳定等优点。

Design of DC magnetron sputtering power supply based on DSP

In this article magnetron regulated power supply with high power and high efficiency is designed on the basis of the full bridge inverter switching power supply technology after studies the load characteristics of magnetron target.A simulating model is composed with MATLAB to study the parameters and the waveforms of the designed circuits, the hardware circuit and the software program are designed on the basis of simulation results.The prototype of power supply is tested.The power supply has experimented on the type of JTP-1400 magnetron sputtering coating machine, the experimental results confirm that the power supply has good constant current control effect, fast response of current cut-off negative feedback and work stability etc.