| 真空自励研磨抛光工艺的研究 |
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| 引用本文： | 张忠玉,王权陡,周军,周德俭.真空自励研磨抛光工艺的研究[J].光学精密工程,2001,9(3):238-241. |
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| 作者姓名： | 张忠玉 王权陡 周军 周德俭 |
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| 作者单位： | 1. 中国科学院长春光学精密机械与
2. 驻二二八厂军代表室, |
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| 基金项目： | 国家自然科学基金资助项目 (6 97780 2 7) |
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| 摘 要： | 详细地阐述了真空自励研磨抛光盘的工作方式、基本原理,并在对120×120mm厚径比小于1/60的超薄镜面实际加工中,成功解决了磨头自身重力对工件变形的影响,降低了元件在加工中支撑要求,有效地解决了超薄元件的数控加工难题.
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| 关 键 词： | 真空自励抛光盘 超薄镜 抛光 数字控制 |
| 文章编号： | 1004-924(2001)03-0238-04 |
| 收稿时间： | 2000-12-21 |
| 修稿时间： | 2000年12月21 |
Polishing technology of vacuum-induced lap |
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| ZHANG Zhong yu ,WANG Quan dou ,ZHOU Jun ,ZHOU De jian.Polishing technology of vacuum-induced lap[J].Optics and Precision Engineering,2001,9(3):238-241. |
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| Authors: | ZHANG Zhong yu WANG Quan dou ZHOU Jun ZHOU De jian |
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| Affiliation: | ZHANG Zhong yu 1,WANG Quan dou 1,ZHOU Jun 2,ZHOU De jian 2 |
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| Abstract: | The paper mainly describes the working function and basic principles of the vacuum induced polishing lap. In manufacturing a face sheet mirror in 120mm?120mm, with thickness to diameter ratio less than 1/60, the mirror deformation caused by the self weight of polishing lap, the support requirement for processing the mirror, as well as the key problems concerning the digital control manufacturing of the ultra thin mirror have been solved successfully. |
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| Keywords: | vacuum induced lap ultra thin mirrors polishing digital control |
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