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常压等离子体渗氮主要工艺参数分析
引用本文:严立,朱新河,徐久军,秦艳,杨毅,高玉周.常压等离子体渗氮主要工艺参数分析[J].材料保护,2002,35(4):34-37.
作者姓名:严立  朱新河  徐久军  秦艳  杨毅  高玉周
作者单位:大连海事大学金属材料工艺所,辽宁,大连,116026
基金项目:国家自然科学基金 (6 0 0 310 0 1子课题 ),交通部通达计划 (95 0 6 0 2 0 2 )资助
摘    要:利用介质阻挡放电,进行了常压非平衡等离子体渗氮,着重讨论了有关工艺参数的影响情况。正交试验结果表明,合理选择放电电压、放电间距和渗氮温度是获得良好渗氮层的关键。在本工艺条件下,适当减小放电间隙,增大电场强度,可以明显提高渗层的硬度和深度。

关 键 词:常压等离子体渗氮  工艺参数  放电电压  放电间距  渗氮温度  渗层  硬度  深度  介质阻挡放电
文章编号:1001-1560(2002)04-0034-04

Essential Parameters for Plasma Nitriding Technology under Atmospheric Pressure
YAN Li,ZHU Xin\|he,XU Jiu\|jun,QIN Yan,YANG Yi,GAO Yu\|zhou.Essential Parameters for Plasma Nitriding Technology under Atmospheric Pressure[J].Journal of Materials Protection,2002,35(4):34-37.
Authors:YAN Li  ZHU Xin\|he  XU Jiu\|jun  QIN Yan  YANG Yi  GAO Yu\|zhou
Abstract:Nonequilibrium Plasma nitriding at atmosphere pressure was carried out through dielectric barrier discharge (DBD). Effects of technology parameters were discussed. Orthogonal experimental results showed that the key for obtaining good nitriding layer was to choose the discharge voltage, discharge interval and nitriding temperature properly. Reducing discharge interval and increasing electric field intensity could increase the hardness and depth of nitriding layer markedly.
Keywords:dielectric barrier discharge  plasma nitriding  atmospheric pressure plasma
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