用于动态红外景物模拟器的超薄氮化钛薄膜

针对动态红外景物模拟器的应用要求,用磁过滤电弧离子镀方法制备了超薄氮化钛薄膜。制备的薄膜厚度介于7. 5nm 至75nm。重点研究了薄膜的微观结构、电阻温度系数、电阻温度稳定性、薄膜的微加工等性质。实验结果表明,氮化钛薄膜是一种良好的辐射电阻材料。

Thin TiNx Films for the Application in Dynamic Infrared-ray Scene Generator

Thin titanium nitride (TiNX) films were prepared by using filterd arc plasma method to meet the requirements of the application of the thin films in dynamic infrared2ray scene generator. Thickness of the prepared thin films was between 7.5nm and 75nm. Microstructures ,temperature coefficient of resistance ,temperature stability and the micromachining of the TiNX thin films were investigated into details. lt has been shown that the thin TiNXfilms are good candidate materials for dy2 namic infrared2ray scene generation application.