8. A specimen-exchange device for an ultra-high vacuum atom-probe field-ion microscope |
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| Authors: | Alfred Wagner Thomas M Hall David N Seidman |
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| Affiliation: | Cornell University, Department of Materials Science and Engineering and the Materials Science Center, Ithaca, NY 14853, USA |
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| Abstract: | A specimen-exchange device is described for an ultra-high vacuum field-ion microscope (FIM). This device completely eliminates the long pump-down period that is required if the FIM chamber is brought back to atmospheric pressure. The pressure in an air-lock is reduced to 10?6 torr before the exchange takes place and the pressure in the FIM chamber remains below 10?7 torr during the exchange and it drops to less than 3 × 10?9 torr within 15 min after the exchange. |
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