| 压弯光栅线密度检测 |
| |
| 引用本文： | 刘斌,楼俊,刘正坤,王秋平,徐向东,付绍军. 压弯光栅线密度检测[J]. 光学精密工程, 2006, 14(6): 986-989 |
| |
| 作者姓名： | 刘斌 楼俊 刘正坤 王秋平 徐向东 付绍军 |
| |
| 作者单位： | 中国科学技术大学,国家同步辐射实验室,安徽,合肥,230029 |
| |
| 基金项目： | 国家"211"工程建设项目 |
| |
| 摘 要： | 对压弯光栅的线密度进行了实验研究。首先制作了大变化率的变线距光栅(约9.2 line/mm),并选取薄玻璃(0.16 mm)作为光栅基底材料。其后采用长程面形仪测试压弯后光栅面形,使用衍射法测试压弯前后光栅线密度,从而得到线密度的变化曲线。实验与理论计算结果误差小于0.41 line/mm rms。
|
| 关 键 词： | 压弯光栅 线密度 光学检测 |
| 文章编号： | 1004-924X(2006)06-0986-04 |
| 收稿时间： | 2006-01-09 |
| 修稿时间： | 2006-05-17 |
Determination of groove density for bending gratings |
| |
| LIU Bin,LOU Jun,LIU Zheng-kun,WANG Qiu-ping,XU Xiang-dong,FU Shao-jun. Determination of groove density for bending gratings[J]. Optics and Precision Engineering, 2006, 14(6): 986-989 |
| |
| Authors: | LIU Bin LOU Jun LIU Zheng-kun WANG Qiu-ping XU Xiang-dong FU Shao-jun |
| |
| Affiliation: | National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China |
| |
| Abstract: | Primary researches on the groove density variations of bending grating were experimented.Firstly,highly varied line-spacing gratings(nearly 9.2 line/mm) were fabricated.Meanwhile thin glasses with the thickness 0.16 mm were chosen as their substrates.Consequently,the long trace profiler was used to test the curved substrates precisely and the groove density of the gratings were measured by diffractive method.Experimental result shows that the error is 0.41 line/mm rms between experimental and theoretical values. |
| |
| Keywords: | bending grating groove density optical metrology |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《光学精密工程》浏览原始摘要信息 |
|
点击此处可从《光学精密工程》下载全文 |
|
