纳米操作加工过程定位检测问题研究

微纳米操作、加工、检测和控制在各个领域获得广泛的研究和应用,在微纳米层次上进行原位、定位的操作、检测、加工是经常遇到的问题。扫描探针显微镜技术(Scanningprobemicroscope,SPM)提供强有力的工具,人们利用其不同类型的针尖与相应样品表面产生的化学或物理作用达到目的。但扫描探针显微镜针尖同时用于检测、加工和成像,会因为针尖磨损、状态的改变,影响检测信息的准确性、可靠性,直接影响结果的判定。本文提出一种在微操作加工过程的定位检测技术,即操作过程工具和探针承担不同任务,工具负责加工操作,探针用于检测并定位于操作加工位置,进行了实验并分析讨论定位过程相关问题。

Study on Location Detection in Nano Manipulation Machining

Micro/nanometer manipulation,machining,detection and controlling are widely studied and applied in many fields while there are still a lot of difficulties in location manipulation,machining or in-site operation.Scanning probe microscope(SPM)is a powerful tool,and much used in manipulation and detecting in micro/nanometer fields.However,when a tip is used as a tool as same for scanning tip in a machining or manipulation process,exactness and reliability of the detected information are influenced because of the abrasion and the changed state of the tip.In this paper,a locating method in micro/nanometer manipulating and detecting is proposed,in which a diamond tool is used for machining and the tip is used for scanning and detecting the machining results.Relative location problems are also discussed.