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High-bandwidth nanopositioning via active control of system resonance |
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| Authors: | Li Linlin Aphale Sumeet S. Zhu Limin |
| Affiliation: | 1.State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China ;2.State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, 310027, China ;3.The Centre for Applied Dynamics Research, School of Engineering, University of Aberdeen, Aberdeen, AB24 3UE, UK ;4.The Shanghai Key Laboratory of Networked Manufacturing and Enterprise Information, Shanghai, 200240, China ; |
| Abstract: | Frontiers of Mechanical Engineering - Typically, the achievable positioning bandwidth for piezo-actuated nanopositioners is severely limited by the first, lightly-damped resonance. To overcome this... |
| Keywords: | nanopositioning stage high-bandwidth resonant mode control tracking control integral resonant control |
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