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High-bandwidth nanopositioning via active control of system resonance
Authors:Li  Linlin  Aphale  Sumeet S.  Zhu  Limin
Affiliation:1.State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
;2.State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, 310027, China
;3.The Centre for Applied Dynamics Research, School of Engineering, University of Aberdeen, Aberdeen, AB24 3UE, UK
;4.The Shanghai Key Laboratory of Networked Manufacturing and Enterprise Information, Shanghai, 200240, China
;
Abstract:Frontiers of Mechanical Engineering - Typically, the achievable positioning bandwidth for piezo-actuated nanopositioners is severely limited by the first, lightly-damped resonance. To overcome this...
Keywords:nanopositioning stage  high-bandwidth  resonant mode control  tracking control  integral resonant control  
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