Back surface reflectors with periodic textures fabricated by self-ordering process for light trapping in thin-film microcrystalline silicon solar cells

Back surface reflectors (BSRs) with grating structures have been developed to enhance light trapping in thin-film hydrogenated microcrystalline Si (μc-Si:H) solar cells. As a grating structure, a periodic honeycomb-like dimple pattern with a period of ～450 nm has been fabricated on Al substrates by a self-ordering process using anodic oxidation of Al. The clear diffraction effect has been confirmed on the patterned Al from the angle-dependent reflection. From quantum efficiency measurements, we found that the periodically patterned BSR can confine the incident light more effectively than the random textured BSR, especially at longer wavelengths.