| 压力传感器温度漂移补偿的一种新方法 |
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| 引用本文： | 张庆鑫 刘理天. 压力传感器温度漂移补偿的一种新方法[J]. 传感器与微系统, 1996, 0(6): 45-48 |
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| 作者姓名： | 张庆鑫 刘理天 |
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| 作者单位： | 清华大学微电子学研究所 |
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| 摘 要： | 提出了一种用于压力传感器的温度漂移补偿新方法。该压力传感器中包含了两个灵敏度不同的敏感电桥，它们被制作于同一芯片不同厚度的膜片上。所采用的一种电阻设置新形式，可有效节省芯片面积。通过双桥间的互补，同时消除了压力传感器的热零点漂移和热灵敏度漂移，文中给出了温度漂移补偿的具体算法及相应的实验结果。
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| 关 键 词： | 压力传感器，双桥结构，温度漂移补偿 |
New Method for Temperature Compensation in Pressure Sensors |
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| Zhang Qingxin, Liu Litian, Li Zhijian. New Method for Temperature Compensation in Pressure Sensors[J]. Transducer and Microsystem Technology, 1996, 0(6): 45-48 |
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| Authors: | Zhang Qingxin Liu Litian Li Zhijian |
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| Abstract: | A new method for temperature compensation of pressure sensors is proposed. Two Wheatstone bridges are fabricated on one chip, and the sensitivities of the bridges are different with each other. A new design of resistance in the sensor can efficiently reduce the chip area. The thermal shifts of both zero output and sensitivity of the pressure sensor are eliminated by the compensation With two bridges. A theoretical analysis and experiment are presented in this paper. |
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| Keywords: | Pressure sensors Two bridged structure Temperature compensation |
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