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Zeolite coated interdigital capacitors as a new type of gas sensor
Authors:K Alberti  J Haas  C Plog and F Fetting
Affiliation:

a Institut für Chemische Technologie der TH Darmstadt, Petersenstr. 20, D-6100 Darmstadt F.R.G.

b Dornier GmbH, Postfach 1360, D-7990 Friedrichshafen 1 F.R.G.

Abstract:The adsorption of a gas influences the dielectric constant of zeolites. This property is used as the sensitive component of a gas sensor.

Planar interdigital capacitors were coated with thin films of zeolites. When gas molecules are adsorbed, the dielectric constant of the zeolite is altered, which causes a change in the capacitance of the interdigital capacitor. This change is strongly dependent on the concentration of adsorbate in the gas phase.

Keywords:
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