| 刀具表面超晶格TiN/AlN纳米多层膜的制备和研究 |
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| 引用本文： | 陈淑花,潘应君,陈大凯,张细菊,吴新杰. 刀具表面超晶格TiN/AlN纳米多层膜的制备和研究[J]. 工具技术, 2006, 40(5): 16-19 |
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| 作者姓名： | 陈淑花 潘应君 陈大凯 张细菊 吴新杰 |
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| 作者单位： | 武汉工业职业技术学院;武汉科技大学 |
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| 摘 要： | 采用脉冲多弧离子镀技术制备TiN/AlN纳米多层膜,随着调制周期的减小,稳定态六方AlN相逐渐转变成亚稳态立方AlN相,形成以TiN/AlN超晶格结构为主的超硬薄膜。与标准图谱的对比可知,TiN/AlN超晶格是AlN在模板立方TiN材料的影响下,在TiN层上以亚稳态相立方结构外延生长所形成。试验表明TiN/AlN薄膜具有良好的耐腐蚀性能以及使用寿命。
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| 关 键 词： | 刀具 TiN/AlN纳米多层膜 多弧离子镀 耐腐蚀 |
| 修稿时间： | 2005-07-01 |
Preparation and Study of TiN/AlN Nano-multilayer on Tool Surface |
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| Chen Shuhua Pan Yingjun Chen Dakai et al. Preparation and Study of TiN/AlN Nano-multilayer on Tool Surface[J]. Tool Engineering(The Magazine for Cutting & Measuring Engineering), 2006, 40(5): 16-19 |
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| Authors: | Chen Shuhua Pan Yingjun Chen Dakai et al |
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| Affiliation: | Chen Shuhua Pan Yingjun Chen Dakai et al |
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| Abstract: | The impulse multi-arc ion plating technique is used to prepare TiN/AlN nano-multilayers. The steady Wurtzite-AlN phase is changed to unsteady NaCl-type crystal structure gradually with reducing film period. The main phase structure of the multilayer is TiN/AlN superlattice with higher hardness. The TiN/AlN superlattice was formed when NaCl-type AlN epitaxial-growth on TiN film surface and influenced by the prototype material. TiN/AlN multilayer also has excellent corrosion resistance and operating life. |
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| Keywords: | tool TiN/AlN nano-multilayer multi-arc ion plating corrosion resistance |
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