| 从工艺参数角度探讨AZ系镁合金表面磁控溅射单层铝及氧化铝膜的耐腐蚀和耐磨损性能 |
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| 引用本文： | 高正源,胡琳盛,刘浪,任毅,李辉君.从工艺参数角度探讨AZ系镁合金表面磁控溅射单层铝及氧化铝膜的耐腐蚀和耐磨损性能[J].材料导报,2017,31(1):90-96. |
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| 作者姓名： | 高正源 胡琳盛 刘浪 任毅 李辉君 |
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| 作者单位： | 1. 重庆交通大学机电与车辆工程学院，重庆 400074; 重庆市计量质量检测研究院，重庆 401121;2. 重庆交通大学机电与车辆工程学院,重庆,400074;3. 重庆交通大学土木工程学院,重庆,400074;4. 重庆大学材料科学与工程学院,重庆,400044;5. 重庆国环环境监测有限公司,重庆,400020 |
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| 基金项目： | 重庆市质量技术监督局科研计划资助项目(CQZJKY2013001;CQZJKY2014017)；国家质量监督检验检疫总局科技计划资助项目(2014QK263)；重庆市南川区科技计划项目(CX201407)；重庆市基础与前沿研究计划项目(cstc2015jcyjBX0140)；重庆市重点产业共性关键技术创新专项(cstc2016zdcy50002) |
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| 摘 要： | AZ系镁合金在工业领域具有广阔的应用前景,但其耐腐蚀性能和耐磨损性能差阻碍了其发展。绿色环保的磁控溅射表面涂覆技术是防止镁合金腐蚀和磨损的方法之一。简要地介绍了磁控溅射镀膜技术的原理及特点,评述了当今磁控溅射的重要发展。结合近几年的实验研究,回顾和总结了溅射沉积薄膜技术的发展历程和应用现状,重点分析了溅射工艺参数对薄膜耐腐蚀和耐磨损性能的影响。最后,展望了磁控溅射技术未来的发展趋势。
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| 关 键 词： | 镁合金 磁控溅射 铝及氧化铝膜 耐腐蚀/耐磨损性能 |
Corrosion and Wear Resistance of Magnetron Sputtering Single-layer Aluminum Film and Aluminum Oxide Film on Surface of AZ Magnesium alloys:A Discussion from a Parameter Prespective |
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| GAO Zhengyuan,HU Linsheng,LIU Lang,REN Yi and LI Huijun.Corrosion and Wear Resistance of Magnetron Sputtering Single-layer Aluminum Film and Aluminum Oxide Film on Surface of AZ Magnesium alloys:A Discussion from a Parameter Prespective[J].Materials Review,2017,31(1):90-96. |
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| Authors: | GAO Zhengyuan HU Linsheng LIU Lang REN Yi and LI Huijun |
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| Affiliation: | School of Mechatronics and Automotive Engineering, Chongqing Jiaotong University, Chongqing 400074;Chongqing Academy of Metrology and Quality Inspection, Chongqing 401121,School of Mechatronics and Automotive Engineering, Chongqing Jiaotong University, Chongqing 400074,School of Civil Engineering, Chongqing Jiaotong University, Chongqing 400074,School of Materials Science and Engineering, Chongqing University, Chongqing 400044 and Chongqing Guohuan Environmental Monitoring Co., LTD, Chongqing 400020 |
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| Abstract: | AZ magnesium alloys has been widely used in industry field. However, the poor corrosion and wear resistance of magnesium and its alloys has been mainly limited their development. Magnetron sputtering is one of the important methods to protect on corrosion and wear of AZ magnesium alloys. The principle and development of magnetron sputtering technologies were introduced in this paper. Based on the experiments in recent years, development and application status of magnetron sputtering technology were reviewed and summarized. And the influence of the sputtering parameters on corrosion and wear resistance of the films was discussed in particular. In the end, the developmental trend of magnetron sputtering was introduced. |
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| Keywords: | magnesium alloy magnetron sputtering aluminum and aluminum oxide films corrosion and wear resistance |
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