基于光学相干层析成像技术的薄膜厚度测量

为了对薄膜厚度进行测量,采用白光谱域光学相干层析成像的测量方法,进行了理论分析和实验验证,对以玻璃为基片的单层和多层薄膜样品进行了层析成像实验,获得了样品的2维层析图像。结果表明,该系统不仅能显示薄膜样品内部的微观结构,而且能从2维层析图像中得到单层和多层薄膜的厚度(分别为68μm和30μm),测量值与理论值相吻合,从而验证了测量理论正确性。该系统具有较高分辨率,可实现快速成像,满足实际工业测量需要。

Film thickness measurement based on optical coherence tomography

A measuring method based on white-light spectral-domain optical coherence tomography was used to measure thin film thickness. The theory was analyzed and the experiment was done. The single-layer and multi-layer thin film on glass substrate was used for imaging experiments respectively and 2-D cross-sectional images were obtained. The experiment shows that system can not only measure the inner microstructure of the film, but also measure the film thickness of single-layer and multi-layer film in 68μm and 30μm respectively. The measured value is the same as the theoretical value, which verifies the validity of the theory. The system has high imaging speed and resolution, and can meet the industrial measurement.