Superresolution character of array confocal system

For the incomplete theory of the array confocal system,the more accurate theoretical model is built, and the new type of three-zone amplitude pupil filter is presented to improve the 3D detecting ability of the array confocal system. The 3D imaging equation based on Kirchhoffs diffraction theo. ry in the paper is more accurate, compared with the exciting theory, and it can describe the system imaging process more exactly. Using the evaluation criterion of 3D superresolution, the parameter of the filter pupil is optimized. It can reduce the axial and transversal FWHM of every detecting channel. The results of computer simulation and experiment prove that the filter can improve the axial and transversal resolution at the same time,which can increase the 3D measure capability.