An Investigation of Titanium Nitride Prepared by a DC Arc Plasma Jet |
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Authors: | Tamaki Masaya Kuwahara Hideyuki Tomii Yoichi Yamamoto Naoichi |
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Affiliation: | (1) Graduate School of Human Environmental Studies, Kyoto University, Yoshida-nihonmatsu-cho, Sakyo-ku, Kyoto, 606-01, Japan;(2) Research Institute for Applied Science, Tanaka Ohi-cho, Sakyo-ku, Kyoto, 606, Japan;(3) Graduate School of Energy Science, Kyoto University, Yoshida-hon-machi, Sakyo-ku, Kyoto, 606-01, Japan |
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Abstract: | The properties of a titanium nitride film prepared by a DC arc plasma jet were investigated by microscopic observations, composition analysis, and hardness measurements. Scanning electron microscopy showed that the film was composed of three phases, designated the A, B, and C regions from the outer surface. The existence of three regions was also supported by composition analysis and hardness measurements on the cross section. XRD patterns showed the presence of -TiN in the A region. In the B region, a number of voids were observed, which have never been reported in previous papers. These were made up from specific crystallographic surfaces. The C region also had a few voids which were somewhat different from those in the B region. In the matrix, an acicular texture was found and identified as -Ti solid solution by XRD. The cross section of the film changed the color determined by the nitrogen content. |
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Keywords: | TiN DC arc plasma jet void WDX hardness |
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