| 基于横向场激励的高频压电超声换能器 |
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| 引用本文： | 张志甜,张超,冯冠平.基于横向场激励的高频压电超声换能器[J].传感技术学报,2010,23(4):461-464. |
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| 作者姓名： | 张志甜 张超 冯冠平 |
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| 作者单位： | 清华大学精密仪器与机械学系,北京,100084;深圳清华大学研究院,深圳,518057;清华大学精密仪器与机械学系,北京,100084;深圳清华大学研究院,深圳,518057 |
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| 基金项目： | 国家自然科学基金项目资助(60571014);;深圳市“双百”计划项目资助 |
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| 摘 要： | 介绍了一种基于横向场激励模式的高频压电超声换能器及其设计、分析和制作过程。采用扩展的Christoffel-Bech-mann方法对LiNbO3、LiTaO3和PMN-33PT三种不同压电材料的a模式横向场压电耦合系数进行了计算,发现这三种材料中LiNbO3具有最大的LFE a模式压电耦合系数,为28%。采用具有最大压电耦合系数的X切LiNbO3设计并制作了基于横向场激励的高频超声换能器,并采用传统的Pulse-Echo方法测试了该超声换能器的中心频率和带宽。实验测得该LFE高频超声换能器的中心频率为34MHz,-6dB带宽为14.4%。从理论和实验上证明了横向场激励模式可以应用于高频超声换能器。
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| 关 键 词： | 高频压电超声换能器 横向场激励 Pulse-Echo方法 铌酸锂 |
High Frequency Piezoelectric Ultrasonic Transducers Based on Lateral Field Excitation |
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| ZHANG Zhitian,ZHANG Chao,FENG Guanping.High Frequency Piezoelectric Ultrasonic Transducers Based on Lateral Field Excitation[J].Journal of Transduction Technology,2010,23(4):461-464. |
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| Authors: | ZHANG Zhitian ZHANG Chao FENG Guanping |
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| Affiliation: | 1.Department of Precision Instruments and Mechanology;Tsinghua University;Beijing 100084;China;2.Research Institute of Tsinghua University in Shenzhen;Shenzhen 518057;China |
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| Abstract: | This paper presents the design,analysis and fabrication of Lateral Field Excited Piezoelectric Ultrasonic transducers. The Lateral field excitation coupling factors of three different kinds of piezoelectric materials (LiNbO3,LiTaO3,PMN-33PT) for a-mode have been calculated with the Extended Christoffel-Bechmann method. It was found that LiNbO3 had the maximum piezoelectric coupling factor of 28 %. The X-cut LiNbO3,which had the maximum piezoelectric coupling factor,was chosen for the design of a lateral fie... |
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| Keywords: | high frequency ultrasonic transducer lateral field excitation pulse-echo method lithium niobate |
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