| 基于FDTD的薄膜体声波谐振器的数值分析 |
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| 引用本文： | 池志鹏,赵正平,吕苗,杨瑞霞.基于FDTD的薄膜体声波谐振器的数值分析[J].半导体技术,2007,32(2):121-124. |
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| 作者姓名： | 池志鹏 赵正平 吕苗 杨瑞霞 |
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| 作者单位： | 河北工业大学,信息工程学院,天津,300130;河北工业大学,信息工程学院,天津,300130;河北半导体研究所,微米纳米中心,石家庄,050051;河北半导体研究所,微米纳米中心,石家庄,050051 |
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| 基金项目： | ASIC国家重点实验室基金 |
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| 摘 要： | 提出了基于时域有限差分方法对薄膜体声波谐振器进行数值分析的新方法.利用时域有限差分法理论对压电材料的控制方程和牛顿方程在空间和时间上进行了离散化,通过得到的差分方程直接得出了声场传播的时域数值解.使用该数值方法对薄膜体声波谐振器的电学特性阻抗进行了分析,并将结果与一维Mason模型的解析解进行了比较验证.
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| 关 键 词： | 压电材料 时域有限差分法 压电谐振器 |
| 文章编号： | 1003-353X（2007）02-0121-04 |
| 修稿时间： | 2006-10-09 |
Finite-Difference Time-Domain Method for the Numerical Analysis of Thin-Film Bulk Acoustic Wave Resonators |
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| CHI Zhi-peng,Zhao Zheng-ping,L Miao,YANG Rui-xia.Finite-Difference Time-Domain Method for the Numerical Analysis of Thin-Film Bulk Acoustic Wave Resonators[J].Semiconductor Technology,2007,32(2):121-124. |
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| Authors: | CHI Zhi-peng Zhao Zheng-ping L Miao YANG Rui-xia |
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| Affiliation: | 1. School of Information Engineering, Hebei University of Technology, Tianjin 300130, China ; 2. Micro/Nano Technology Center, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China |
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| Abstract: | A new application of the finite-difference time-domain (FDTD) method for the numerical analysis of electromechanical phenomena of thin-film bulk acoustic wave resonators (FBAR) was described. The piezoelectric governing equations and Newton' s equation were discretized in spatial and temporal domain by the FDTD theory, and the numerical solutions of the acoustic propagation in the time domain could be obtained directly by these difference equations. The impedance characteristics of A1N FBAR were presented by the proposed numerical method, and the results were demonstrated to be according with the analytical solutions of the 1-D Mason model. |
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| Keywords: | piezoelectric material FDTD method FBAR |
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