Laser forming of silicon films using nanoparticle precursor |
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Authors: | Sachin Bet Aravinda Kar |
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Affiliation: | (1) Laser-Aided Manufacturing, Materials and Micro-processing Laboratory (LAMMMP), College of Optics and Photonics (COP), Center for Research and Education in Optics and lasers (CREOL), Mechanical Materials and Aerospace Engineering (MMAE), University of Central Florida, 32816-2700 Orlando, FL |
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Abstract: | Polycrystalline silicon films containing cubic silicon crystallites of size 3–4 μm have been formed on nickel substrates by fusing and sintering silicon nanoparticle precursors using a laser. A mechanism for the fusion and sintering of these nanoparticles, resulting in reduced heat input and continuous film formation by surface and grain boundary diffusion, is discussed. Films were characterized by optical microscopy, scanning electron microscopy, energydispersive spectroscopy, and Raman spectroscopy. Films were doped with n- as well as p-type dopants by using a laser doping technique and their current-voltage (I–V) characteristics were measured. |
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Keywords: | Silicon nanoparticles laser crystallization SEM differential scanning calorimetry (DSC) Raman spectroscopy laser doping Schottky diode |
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