| 565Mbit／s高速光通信系统用SAWF研制 |
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| 引用本文： | 李涛,梅锁海,刘文. 565Mbit／s高速光通信系统用SAWF研制[J]. 光通信研究, 1994, 0(Z1) |
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| 作者姓名： | 李涛 梅锁海 刘文 |
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| 作者单位： | 邮电部固体器件研究所 |
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| 摘 要： | 本文阐述了６３５．６１６ＭＨｚ窄带ＳＡＷＦ设计特点，并着重对其叉指电极制作中的光刻、刻蚀及膜厚测量等工艺进行了探讨。该ＳＡＷＦ插入损耗小于１５．５ｄＢ，Ｑ值高于６０Ｏ
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| 关 键 词： | 声表波滤波器，叉指电极，刻蚀 |
Design and Fabrication of SAWF for 565Mbit/s High Speed Optical Communication System |
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| Li Tao, Mei Suohai, Liu Wen. Design and Fabrication of SAWF for 565Mbit/s High Speed Optical Communication System[J]. Study on Optical Communications, 1994, 0(Z1) |
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| Authors: | Li Tao Mei Suohai Liu Wen |
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| Affiliation: | Li Tao; Mei Suohai; Liu Wen |
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| Abstract: | In this paper, the design features of 635. 616MHz narrow band SAWF is presented, the lithography,dry etching and the film thickness measuring methods during the fabrication process are mainly discussed,the typical characteristics of the filters show the insertion loss less than 15. 5dB,and Q value more than 600. |
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| Keywords: | surface acoustic filter IDT etching |
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