Fabrication and manipulation of solid-state SiO2 nano-gears on a gold surface

A process is presented to fabricate solid-state nano-gears down to a 60?nm outer diameter with six teeth, where the 350?nm diameter ones already have 24 teeth. The small gears are free to move on a polycrystalline gold surface. The gears can be manipulated one by one, using an atomic force microscope (AFM) tip, to construct a train of gears where mechanical motion can be transmitted from one gear to another by mastering the surface friction. This is a first step on the way to bridge the fabrication gap between microfabricated and molecule gears.