| 大型单晶炉炉内压力的控制研究 |
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| 引用本文： | 张红勇,方军,赵泰延,王建春. 大型单晶炉炉内压力的控制研究[J]. 电子工业专用设备, 2009, 38(1): 43-46 |
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| 作者姓名： | 张红勇 方军 赵泰延 王建春 |
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| 作者单位： | 西安理工晶体科技有限公司,陕西西安,710077;西安理工晶体科技有限公司,陕西西安,710077;西安理工晶体科技有限公司,陕西西安,710077;西安理工晶体科技有限公司,陕西西安,710077 |
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| 摘 要： | 随着晶体生长理论和生长技术的发展，各种高纯度的晶体已经生产出来，这给晶体管的研制创造了便利条件，同时，也对生长设备的要求提出更加严格的要求。论述单晶炉炉内压力的控制；通过调节比例阀的开度起到改变抽气的速率；从而达到调节炉内压力的目的；实现了理想的压力控制。
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| 关 键 词： | 机械泵 电动蝶阀 真空测头 PID控制 前馈控制 |
Pressure Control Research of Large Size Crystal Equipment |
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| ZHANG Hongyang,FANG Jun,Zhao Qinyan,WANG Jianchun. Pressure Control Research of Large Size Crystal Equipment[J]. Equipment for Electronic Products Marufacturing, 2009, 38(1): 43-46 |
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| Authors: | ZHANG Hongyang FANG Jun Zhao Qinyan WANG Jianchun |
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| Affiliation: | (XAVT Crystal growing Technolgy co., Ltd., Xi＇an 710048, China) |
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| Abstract: | Many kinds high purity crystal has been produced successfully along with the crystal growth theory and technology development.This,not only provides advantages for transistor research,but also puts forward more strict requests for growing equipment.This paper mainly describes the pressure con-trol of the large size crystal growing equipment.Throttle valve is used to adjust the exhausting rate of gas to change the pressure in the furnace.It gets perfect result. |
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| Keywords: | Mechanical pump Throttle valve Vacuum gauge PID control Feed forward action. |
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