| 射频磁控溅射制备类金刚石薄膜 |
| |
| 引用本文： | 梁志敏,翟建广,张锋.射频磁控溅射制备类金刚石薄膜[J].上海工程技术大学学报,2013,27(3):244-247. |
| |
| 作者姓名： | 梁志敏 翟建广 张锋 |
| |
| 作者单位： | 上海工程技术大学材料工程学院,上海,201620 |
| |
| 基金项目： | 上海工程技术大学校科研启动资金资助项目（校启2013-07） |
| |
| 摘 要： | 采用射频磁控溅射法在Si和Ti合金基体上沉积出类金刚石(DLC)薄膜.利用拉曼光谱仪、划痕仪和扫描电子显微镜分析了DLC薄膜的结构、膜基附着力和表面形貌.结果表明:射频磁控溅射法能够制备出表面平整、结构致密的DLC薄膜;同时基体材料的不同不会影响DLC薄膜的键合结构,Si基体上涂层附着力为30N,Ti基体上膜基结合力大于40 N.
|
| 关 键 词： | 射频磁控溅射 类金刚石薄膜 膜基结合力 |
Diamond-Like Carbon Deposited by RF Magnetron Sputtering |
| |
| LIANG Zhimin,ZHAI Jianguang,ZHANG Feng.Diamond-Like Carbon Deposited by RF Magnetron Sputtering[J].Journal of Shanghai University of Engineering Science,2013,27(3):244-247. |
| |
| Authors: | LIANG Zhimin ZHAI Jianguang ZHANG Feng |
| |
| Affiliation: | (College of Materials Engineering, Shanghai University of Engineering Science, Shanghai 201620, China) |
| |
| Abstract: | Diamond-like carbon （DLC） thin films were deposited on Si and Ti alloy substrates by RF magnetron sputtering. The structure, adhesion and surface morphology of DLC film were investigated by the Raman spectrometer, scratch tester, scanning electron microscopy （SEM）. Results show that this method can prepare the DLC film with smooth surface and high density. The different substrates have no effects on the bonding structure,the adhesions on Si and Ti substrates are 30 N and over 40 N respectively. |
| |
| Keywords: | radiofrequency magnetron sputtering diamond like carbon（DLC） film film adhesion |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《上海工程技术大学学报》浏览原始摘要信息 |
|
点击此处可从《上海工程技术大学学报》下载全文 |
|
