不锈钢方轨形靶PIII处理及流体力学模拟*

对方轨形AISI304不锈钢靶进行了氮的等离子体浸没离子注入(PI II)处理，试验结果表明，表面硬度明显提高，摩擦学特性也得到显著改善。其中上表面的 改 性效果明显优于侧表面。利用二维流体模型对注入过程中等离子体行为进行了模拟研究，结 果表明：最大的注入剂量发生在上表面的中心区，在侧表面附近由于离子受到底面的竞争吸 引，而使注入的剂量明显低于上表面，因而得到不同的改性效果。

PLASMA IMMERSION NITROGEN ION IMPLANTATION (PIII) OF THE SQUARE SLEEPER TARGET OF STAINLESS STEEL AND FLUID SIMULATION

Plasma immersion nitrogen ion implantation of squar es leeper target of SS304 stainless steel is presented. The experimental results show that the surface microhardness is substantially increased and the tribolog ical properties are also greatly improved, in which the properties of the top su rface is more modified than that of the side surfaces. The plasma dynamic proces s is simulated by two dimensional fluid model in the PIII of the square target. It is found that the implanted dose peaks in the center of the top surface, and the dose implanting into the side surfaces is much less than that of the top su rface owing to that the ions flowing nearby are absorbed by both of the side sur face and the bottom extension surface, thereby leading to different modified res ults.