磁控溅射工艺对沉积丙纶无纺布基底金属薄膜的影响

本文利用直流磁控溅射法在丙纶无纺布基底沉积铜、不锈钢及氧化铜薄膜,研究了本底真空度、工作气体流量、溅射功率、工作气压等溅射工艺参数对薄膜沉积速率、薄膜厚度和表面形貌的影响规律,测试了镀膜前后样品的抗紫外和抗红外性能。结果表明,一定范围内的本底真空度的变化对成膜性能影响很小;存在一个比较合适的氩气流量大小和工作气体压强范围,使得沉积速率最大;沉积速率与溅射功率成正相关关系。经测试,镀铜膜后的织物抗紫外性能明显提高。

Synthesis and Characterization of Magnetron Sputtered Conductive Coating on Non-Woven Fabric Substrates

Conductive coatings,of stainless steel,Cu and CuO,were deposited on substrate of polypropylene(PP) non-woven fabric.The influence of the deposition conditions,including the base pressure,argon flow-rate,sputtering power,deposition rate and film thickness,on the anti-ultraviolet(infrared) behavior was investigated with X-ray diffraction,scanning electron microscopy,atomic force microscopy and Fourier transform infrared(FTIR) spectroscopy.The preliminary results show that the Cu-coating considerably increased the anti-ultraviolet function of the fabric.As expected,a higher sputtering power increased the deposition rate,improved the compactness,decreased the grain-size and strengthened the interfacial adhesion.A high pressure of residual gases negatively affected the film growth.The argon flow rate,pressure,deposition rate,and film thickness should be optimized depending on the anti-ultraviolet(infrared) requirements,applications and production cost.