| 发展中的RF MEMS开关技术 |
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| 引用本文： | 张永华,丁桂甫,蔡炳初,蒋振新. 发展中的RF MEMS开关技术[J]. 微纳电子技术, 2003, 40(5): 28-32 |
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| 作者姓名： | 张永华 丁桂甫 蔡炳初 蒋振新 |
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| 作者单位： | 上海交通大学微纳米科学技术研究院,上海200030 |
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| 基金项目： | 信息产业部微电子技术项目(41308050116) |
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| 摘 要： | 射频MEMS开关是用MEMS技术形成的新的电路元件,与传统的半导体开关器件相比具有插入损耗低、隔离度大、线性度好等优点,将对现有雷达和通信中RF结构产生重大的影响。介绍了射频MEMS开关的工作原理、优化设计,分析了可靠性问题,举例说明了射频MEMS开关的应用,指出了其发展所面临的问题。
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| 关 键 词： | 射频开关 MEMS技术 高频电路 |
Developing RF MEMS switches technology |
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| ZHANG Yong-hua,DING Gui-fu,CAI Bing-chu,JIANG Zhen-xin. Developing RF MEMS switches technology[J]. Micronanoelectronic Technology, 2003, 40(5): 28-32 |
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| Authors: | ZHANG Yong-hua DING Gui-fu CAI Bing-chu JIANG Zhen-xin |
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| Abstract: | Radio-frequency(RF)micro-electro-mechanical systems (MEMS )switches are new class circuit components fabricated utilizing MEMS technology.Compared with solid state switches such as GaAs MESFETs and p-i-n diodes,RF MEMS switches have advantages including a low insertion loss,high electrical isolation,low intermodulation products and low consumption,and will provide a major impact on existing RF architectures in radar and communications.The opera-tion principle,optimum design and reliability analysis are presented,the applications of which are illustrated with examples.Challenges encountered of the development for RF MEMS switches technology are braught up. |
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| Keywords: | RF switch MEMS technology high-frequency circuits |
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