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磁性薄膜微电感器件的研究进展
引用本文:高孝裕,陈吉安,周勇,雷冲,王明军,张亚民,周志敏,毛海平.磁性薄膜微电感器件的研究进展[J].电子元件与材料,2005,24(4):68-71.
作者姓名:高孝裕  陈吉安  周勇  雷冲  王明军  张亚民  周志敏  毛海平
作者单位:上海交通大学微纳米科学技术研究院,薄膜与微细技术教育部重点实验室,上海,200030
基金项目:国家自然科学基金;上海市纳米科技专项基金
摘    要:综述了磁性薄膜微电感的研究现状,介绍了四种不同电感器件的结构设计(平面螺旋型,磁芯螺线管,曲折结构及夹心条状结构)及其优缺点和磁芯材料(坡莫合金,铁氧体,非晶,纳米晶软磁)对电感器件的影响。

关 键 词:电子技术  磁性薄膜  综述  微电感  结构设计  磁芯材料  电感量  品质因子
文章编号:1001-2028(2005)04-0068-04

Development of the Magnetic Thin Film Microinductor
GAO Xiao-yu,CHEN Jian,ZHOU Yong,LEI Chong,WANG Ming-jun,ZHANG Ya-min,ZHOU Zhi-min,MAO Hai-ping.Development of the Magnetic Thin Film Microinductor[J].Electronic Components & Materials,2005,24(4):68-71.
Authors:GAO Xiao-yu  CHEN Jian  ZHOU Yong  LEI Chong  WANG Ming-jun  ZHANG Ya-min  ZHOU Zhi-min  MAO Hai-ping
Abstract:Reviewed was the current status of the magnetic thin film microinductors. Four kinds of different microinductors, including their structure designs, merits and drawbacks were introduced. According to different design requirements and their applications, various core materials are selected to use in the fabrication of the microinductor. The effects of the core materials on microinductor are also discussed.
Keywords:electronic technology  magnetic thin film  review  microinductor  structure designs  magnetic core material  inductance value  quality factor  
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