石英单基多谐振器力敏特性与加力方位的关系

根据石英晶体振动理论及力敏特性,在同一圆形晶体基片上设计制作了多个石英晶体谐振器。采用对径加力的方式,研究了这种石英单基多谐振器的力敏特性与加力方位的关系,并与传统的单基单电极谐振器的力敏特性进行了比较。实验结果表明,同一晶体基片上不同位置的谐振器的力敏特性与加力方位密切相关;选择适当的加力方位,可使多电极结构的谐振器的力-频转换系数优于单电极谐振器的力-频转换系数。

Relation of Force Sensitive Characteristic and Adding Force Azimuth of the Quartz Crystal Single-Base Multi-Resonator

According to quartz crystal vibrated theory and force sensitive characteristic,some quartz crystal resonators were manufactured on the disc crystal.The force applied along the dia-meter of quartz plate,the relation of resonators' force sensitive characteristic and adding force azimuth were studied and compared with the traditional single-base single-electrode resonator force sensitive characteristic.The result approves that the force sensitive characteristics of the resonators at the same crystal substrate different positions are correlated with adding force azimuth strongly,force-frequency conversion coefficient of the multi-electrode structure resonator is better than that of the single-electrode resonator by selecting a suitable adding force position.