Transmission of a microcavity structure in a two-dimensional photonic crystal based on macroporous silicon

Photonic crystals consist of regularly arranged dielectric scatterers of dimensions on a wavelength scale, exhibiting band gaps for photons, analogous to the case of electrons in semiconductors. Using electrochemical pore formation in n-type silicon, we fabricated photonic crystals consisting of air cylinders in silicon. The starting positions of the pores were photolithographically pre-defined to form a hexagonal lattice of a=1.58 μm. The photonic crystal was microstructured to make the photonic lattice accessible for optical characterization. Samples with different filling factors were fabricated to verify the gap map of electric and magnetic modes using Fourier-transform infrared (IR) spectroscopy. The complete band gap could be tuned from 3.3 to 4.3 μm wavelength. We were able to embed defects such as waveguide structures or microcavities by omitting certain pores. We carried out transmission measurements using a tunable mid-IR optical parametric oscillator. The resonance is compared with theoretical expectations.